WFS-100A Adsorption Tail Gas Treatment Equipment
The types of gases that can be treated by the scrubbing tail gas treatment device include electronic gases used in the etching process and chemical vapor deposition process in the semiconductor, liquid crystal and solar industries, mainly including SiH4, SiH2Cl2, PH3, B2H6, TEOS, H2, Co, NF3, SF6, C2F6, wf6, NH3, N2O, etc.
| Product Parameters |
| 1 | Machine Model | WFS-100A |
| 2 | Scrubbing Type(Type of gas treatment principle) | Chemical adsorption |
| 3 | Capacity(Maximum gas processing flow) | 120SLM |
| 4 | Dimension(mm)Machine size | 1040(L)*700(W)*1850(H) |
| 5 | power | 1Ψ,220V 50/60HZ 15A |
| 6 | GN2(nitrogen) | 3/8"Swagelok Fitting,5~6kg/cm2(80psi),30~50L/m |
| 7 | System inlet | ISO-100(4” tube) |
| 8 | System outlet | ISO-100(4” tube) |
| 9 | Vent(Dimension of exhaust port of machine cavity) | 4” tube,100CFM |
| Type of gas to be treated |
| product | Gas type |
| Acid gas | AC-series | BF3,HF,F2,WF+,SiF4.ect |
| Hydride or metal containing gas | HM-series | PH3,AsH3,GeF4,B2H6,ect |
| Halogenated gas | BA-series | NH3,Na(OH),ect |
| Nitride gas | NT-series | NH3,TDMAT,HCW,N2O,NO,NO2,Nox,ect |
| Organic gas | OC-series | SiH4,DCS,TCS,TEOS,DEZ,PGMEA,ect |
| Sulfide gas | SL-series | H2S,H2Se,SO2,ect |
Project Case
Packaging is necessary for the manufacturing process of semiconductor electronic chips, and packaging technology is very critical for integrated circuits. In addition to advanced production equipment, production lines, stable and safe gas supply equipment are also essential. The packaging equipment in the semiconductor industry will use the gas after the matching. Only by ensuring the accuracy of the gas concentration and accuracy of the matching can the stability of the packaging quality be guaranteed, and continuous matching gas supply is also a necessary condition for packaging.
FAQ
1. who are we?
We are based in Guangdong, China, start from 2011,sell to Southeast Asia(20.00%),Africa(20.00%),Eastern Asia(10.00%),Mid East(10.00%),Domestic Market(5.00%),South Asia(5.00%),Northern Europe(5.00%),Central America(5.00%),Western Europe(5.00%),South America(5.00%),Eastern Europe(5.00%),North America(5.00%). There are total about 51-100 people in our office.
2. how can we guarantee quality?
Always a pre-production sample before mass production;
Always final Inspection before shipment;
3.what can you buy from us?
pressure regulator,Tube fittings,solenoid valve,Needle valve,check valve
4. why should you buy from us not from other suppliers?
We have a couple of years with professional engineers and dedicated technicians.can provide security products for you
5. what services can we provide?
Accepted Delivery Terms: FOB,CIF,EXW；
Accepted Payment Currency:USD,CNY;
Accepted Payment Type: T/T,L/C,Western Union;
Language Spoken:English,Chinese
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WFS-100A Adsorption Tail Gas Treatment Equipment 120SLM 220V 50 / 60HZ Gas Media Images
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